Computer Science – Performance
Scientific paper
Mar 1997
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.2871..136s&link_type=abstract
Proc. SPIE Vol. 2871, p. 136-144, Optical Telescopes of Today and Tomorrow, Arne L. Ardeberg; Ed.
Computer Science
Performance
Scientific paper
The 8 m coating unit for the VLT mirrors is designed for the deposition of high reflective, homogeneous aluminum coatings. For the process of the film deposition the sputter technology is utilized. The design of the following major subsystems is completed: the vacuum vessel and the vacuum generation system, the thin film deposition equipment and the glow discharge cleaning device, the substrate support and rotation system as well as the supporting framework and the auxiliary equipment. Manufacturing of the coating unit has started. The pre- assembly and testing activities, which will take place prior to the shipment to the site, are defined. This paper describes the design features and the major performance requirements of the 8 m coating unit. The performance of the sputter source design has been verified in a qualification test. The deposition rate, the film thickness and reflectance, as well as the film purity have been measured. The test set-up and the results of the qualification tests of the selected magnetron type are presented and discussed.
Clow H.
Ettlinger E.
Groessl M.
Nienaber U.
Schneermann Michael W.
No associations
LandOfFree
Design and performance of the VLT 8-m coating unit does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with Design and performance of the VLT 8-m coating unit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Design and performance of the VLT 8-m coating unit will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-876700