Design and fabrication of thin film monolithic uncooled infrared detector arrays

Details Design and fabrication of thin film monolithic uncooled infrared detector arrays Design and fabrication of thin film monolithic uncooled infrared detector arrays

Jul 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2225...62l&link_type=abstract

Proc. SPIE Vol. 2225, p. 62-71, Infrared Detectors and Focal Plane Arrays III, Eustace L. Dereniak; Robert E. Sampson; Eds.

Computer Science

Performance

3

Scientific paper

This paper discusses the design of monolithic thin film thermal detectors, with particular reference to the parameters which influence performance such as thermal conductance. Methods for implementing thermal isolation are described, and critical fabrication technology is outlined. Optional materials technology for thin film resistance bolometers is reviewed, and consideration is given to bias and signal conditioning techniques.

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