Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control

Details Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control

Oct 2004

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5553...39z&link_type=abstract

Advanced Wavefront Control: Methods, Devices, and Applications II. Edited by Gonglewski, John D.; Gruneisen, Mark T.; Giles, Mi

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This paper describes design and fabrication of a microelectromechanical metal spatial light modulator (SLM) integrated with complementary metal-oxide semiconductor (CMOS) electronics, for high-dynamic-range wavefront control. The metal SLM consists of a large array of piston-motion MEMS mirror segments (pixels) which can deflect up to 0.78 µm each. Both 32x32 and 150x150 arrays of the actuators (1024 and 22500 elements respectively) were fabricated onto the CMOS driver electronics and individual pixels were addressed. A new process has been developed to reduce the topography during the metal MEMS processing to fabricate mirror pixels with improved optical quality.

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