Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

Details Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

Oct 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4091...83y&link_type=abstract

Proc. SPIE Vol. 4091, p. 83-89, Imaging Technology and Telescopes, James W. Bilbro; James B. Breckinridge; Richard A. Carreras;

Biology

Quantitative Biology

Tissues and Organs

Scientific paper

A novel Microelectromechanical Systems (MEMS) deformable mirror (DM) technology for large, light weight, segmented space telescopes is being proposed. This technology is reported to provide an unprecedented imaging capability in a visible and near infrared spectral range. The MEMS-DM proposed in this paper consists of a continuous membrane mirror supported by electrostatic actuators with pixel-to-pixel spacing as small as 200 micrometer. An array of 4 X 4 electrostatic actuators for the DM has been successfully fabricated by a new membrane transfer technique. The fabricated actuator membrane has been characterized by using an optical surface profiler. The actuator shows a vertical deflection of 0.37 micrometer at 55 V. This device can also address requirements for smaller size and high resolution applications involving optical transmission through aberrating mediums such as imaging and optical communications through atmospheres, high resolution biometric retina signatures through the eye and endoscopic investigation of tissues and organs.

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