Design and Fabrication of a Novel Micro Electromagnetic Actuator

Details Design and Fabrication of a Novel Micro Electromagnetic Actuator Design and Fabrication of a Novel Micro Electromagnetic Actuator

2008-05-07

arxiv.org/abs/0805.0935v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.

Affiliated with

Also associated with

No associations

Rating

Design and Fabrication of a Novel Micro Electromagnetic Actuator does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Design and Fabrication of a Novel Micro Electromagnetic Actuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Design and Fabrication of a Novel Micro Electromagnetic Actuator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-491239