Computer Science
Scientific paper
Jul 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005esasp.591..281p&link_type=abstract
In: Proceedings of the 11th European Space Mechanisms and Tribology Symposium, ESMATS 2005, 21-23 September 2005, Lucerne, Switz
Computer Science
Miniature Mechanisms
Scientific paper
Precise motions in the nanometer and Angstrom range can be achieved by magnetic forces, deflecting a spring mounted platform. Permanent magnets, which are mounted on that platform, are either attracted or repelled by magnetic fields, which are generated in rigidly mounted coils underneath the magnets. These electro-magnetic forces are counter-balanced by mechanical springs, which suspend the platform from the same rigid frame to which the coils are mounted. Rapid actuation may cause mechanical ringing if such a stage is not properly damped. We have evaluated internal friction of the springs as damping mechanism. We found that polyimide springs provide two to three times better damping and moderate temperature dependence compared one made of stainless steel. This allowed us increasing the scan speed of an AFM by a factor of more than two.
Brändlin-Müller D.
de Rooij Nico F.
Gautsch S.
Howald Ludovic
Parrat Daniel
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