Deformable mirrors for high-power lasers

Details Deformable mirrors for high-power lasers Deformable mirrors for high-power lasers

Feb 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4493...55s&link_type=abstract

Proc. SPIE Vol. 4493, p. 55-63, High-Resolution Wavefront Control: Methods, Devices, and Applications III, John D. Gonglewski; M

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We describe the performance of a bulk micromachined deformable mirror coated with a dielectric stack for adaptive optics applications with high power lasers. A reflectance of greater than 99.9% was measured and the mirror had a residual static aberration of less than 90 nm rms primarily in astigmatism. A thermally induced distortion of 71 nm RMS was observed for an incident intensity of 300 W/cm2 and an average power of 57 W. The multi-layer coated deformable mirror survived over half a billion cycles without degradation and survived for 30 hours with 36 W cw 1064 nm laser light. In addition, the thermally induced distortion with 22 W of average laser power (350 W/cm2) was reduced from 88 nm to 31 nm rms.

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