Data needs for diagnostics of low pressure plasmas

Details Data needs for diagnostics of low pressure plasmas Data needs for diagnostics of low pressure plasmas

Nov 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000aipc..543...17g&link_type=abstract

ATOMIC AND MOLECULAR DATA AND THEIR APPLICATIONS: ICAMDATA Second International Conference. AIP Conference Proceedings, Volume

Statistics

Applications

Plasma Diagnostic Techniques And Instrumentation

Scientific paper

The low pressure plasma processing environment is complex and presents many diagnostic challenges. Here the diagnostic techniques used for accurate and detailed measurement of the density and energy distributions of charged and neutral species are reviewed. Most of the techniques rely heavily on atomic and molecular data. The specific data needs of each diagnostic are outlined. It is shown that in total these data needs are vast and diverse and cannot all be met from specific measurements or calculations. The real need is for generic scaling rules for each of the significant atomic and molecular processes. .

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