Controlled dissolution of a piezoelectric material berlinite (AlPO4)

Details Controlled dissolution of a piezoelectric material berlinite (AlPO4) Controlled dissolution of a piezoelectric material berlinite (AlPO4)

Jun 1992

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1992esasp.340..377c&link_type=abstract

In ESA, Frequency and Time Forum p 377-381 (SEE N93-24978 09-70)

Computer Science

Performance

Aluminum Compounds, Chemical Machining, Dissolving, Etching, Phosphates, Piezoelectric Crystals, Resonators, Characterization, High Frequencies, Performance Tests, Reaction Kinetics, Surface Finishing, Surface Properties

Scientific paper

The results on the controlled dissolution of berlinite aimed at realizing AT high frequency (75 Hz) resonators are presented. The dissolution takes place in acid solutions (H3PO4 or H2SO4) of aluminum phosphate. The dissolution kinetics and evolution of the surface state are controlled during the chemical machining process by frequency variation of resonance and roughometry. After systematic study, the controlled dissolution bath giving the best results is used to prepare AT berlinite resonators. Theses are characterized by their piezoelectric performances and compared to resonators obtained by ion bombardment or to similarly oriented quartz resonators.

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