Computer Science – Performance
Scientific paper
Jan 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002iaf..confe.461y&link_type=abstract
IAF abstracts, 34th COSPAR Scientific Assembly, The Second World Space Congress, held 10-19 October, 2002 in Houston, TX, USA.,
Computer Science
Performance
Scientific paper
Integration of micro contact sensors onto a ball bearing is a critical technology necessary for on-line bearing health monitoring in an industrial harsh environment and evaluation of the bearing performance and design. The current planner fabrication methods offered by the MEMS technology restrict the possibility of integrating micro sensor onto a double contoured bearing surface in a more traditional manufacturing environment. We have developed an unique technique to directly fabricate micron-sized pressure and temperature sensors onto a miniature ceramic ball bearing. A complete fabrication process, based on sensor design, surface preparation, optimized sputtering parameters, photolithographic techniques and sensor post-treatment, is described. Pressure and temperature measurement results on a miniature ceramic ball bearing show good correlation with numerical thermal-EHL analysis and good wear resistance. Keywords: Ball Bearing, Thin film Sensor, Pressure sensor, Temperature Sensor, adhesion, wear resistance, Non-developable surface, and thermal-EHL.
Just-Agosto Frederick
Romero Edwar
Yi Jia
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