Statistics – Applications
Scientific paper
Jan 1998
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aipc..420..724s&link_type=abstract
Space technology and applications international forum - 1998. AIP Conference Proceedings, Volume 420, pp. 724-728 (1998).
Statistics
Applications
Growth In Microgravity Environments
Scientific paper
It has been shown repeatedly that atomic oxygen is a crucial reactant for preparing technologically important oxide thin films such as superconductors or ferroelectrics. Unfortunately, atomic oxygen is extremely difficult to generate because of the high bond strength of molecular oxygen and also because of its high corrosive reactivity. A concentrator structure flying in low earth orbit has been shown effective in focusing low energy atomic oxygen onto a wafer. Phase II activity is centered on analyzing the flight data and adapting the concept for use in ground based commercial systems for production of oxide thin films using broad beam oxygen ion sources.
Bensaoula Abdelhak
Eipers-Smith K.
Garton Donna J.
Minton T.
Schultz A. J.
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