Computer controlled optical surfacing for off-axis aspheric mirrors

Computer Science

Scientific paper

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Asphericity, Metrology, Mirrors, Numerical Control, Profilometers, Cost Effectiveness, Fabrication, Grinding, Interferometry

Scientific paper

A computer-controlled optical surface (CCOS) process has been developed that is in routine use for fabricating off-axis and centered aspheric mirrors. The CCOS process effects surface removal by moving a relatively small tool over the mirror surface in a path covering the entire surface. The removal is computed by the convolution of the tool work function with the path of the tool over the mirror surface. The combination of CCOS with microgrinding (grinding with fine tool over the mirror surface. The combination of CCOS with microgrinding (grinding with fine diamond powders which produce a specular surface) allows interferometric testing at an early stage of the process. Surface figure accuracies better than 20 nm rms and finishes better than 10 A are currently achieved.

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