Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch

Details Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch

Aug 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3553..138w&link_type=abstract

Proc. SPIE Vol. 3553, p. 138-145, Detectors, Focal Plane Arrays, and Imaging Devices II, Pingzhi Liang; Marc Wigdor; William G.

Computer Science

Scientific paper

In this paper, the compatibility of P(superscript +)-Ge(subscript x)Si(subscript 1-x)/p-Si heterojunction internal photoemission IR detector (HIP IRD) with its CMOS readout circuit is analyzed with a feasible approach presented. The experimental chip in which P(superscript +)-Ge(subscript x)Si(subscript 1-x)/p-Si HIP IRD and its NMOS readout switch are monolithically integrated has been fabricated with a 3 micrometers NMOS technology. The MBE grown detector without the dielectric cavity and anti-reflecting layer has a blackbody detectivity D*(subscript (500, 1000, 1)) of 1.1 X 10(superscript 9)cmHz(superscript 1/2)/W at the temperature of 77K. The selective readout of the output signals of the detectors through the NMOS readout switch at 77K has been achieved. Therefore, the feasibility of fabricating monolithically integrated P(superscript +)-Ge(subscript x)Si(subscript 1-x)/p-Si HIP IR focal plane array with NMOS readout circuit was demonstrated preliminarily.

Affiliated with

Also associated with

No associations

Rating

Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Compatability of P+-GexSi1-x/p-Si heterojunction internal photoemission infrared detector with its monolithically integrated MOS readout switch will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1542187