Circumferential and inner diameter metrology for the Advanced X-ray Astrophysical Facility (AXAF) optics

Mathematics – Logic

Scientific paper

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Diameters, Grazing Incidence, Metrology, Optical Equipment, X Ray Astrophysics Facility, Circumferences, Technological Forecasting, X Ray Spectra

Scientific paper

The circularity and inner diameter station (CIDS) intended for acquiring data on the inside surfaces of the AXAF optics throughout the entire fabrication process is described. The CIDS is capable of measuring inner diameters of over 40 inches to within 70 microinches. It acquires circularity data which are accurate to better than 1 microinch rms after averaging and the removal of systematic errors.

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