Other
Scientific paper
Oct 1999
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1999spie.3794...76o&link_type=abstract
Proc. SPIE Vol. 3794, p. 76-86, Materials and Electronics for High-Speed and Infrared Detectors, Stephen M. Goodnick; Walter F.
Other
1
Scientific paper
PtSi/Si Schottky junctions, fabricated using a conventional technique of Pt deposition with a subsequent thermal anneal, are examined using X-ray diffraction, atomic force microscopy and a novel prism/gap/sample optical coupling system. With the aid of X-ray diffraction and atomic force microscopy it is shown that a post-anneal etch in aqua regia is essential for the removal of an unreacted, rough surface layer of Pt, to leave a much smoother PtSi film. The prism/gap/sample or Otto coupling ring is mounted in a small UHV chamber and has facilities for remote variation of the gap (by virtue of a piezo-actuator system) and variation of the temperature in the range of approximately 300 K - 85 K. The system is used to excite surface plasmon polaritons on the outer surface of the PtSi and thus produce sensitive optical characterization as a function of temperature. This is performed in order to yield an understanding of the temperature dependence of phonon and interface scattering of carriers in the PtSi.
Cairns Gerald F.
Dawson Paul
O'Prey Shane
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