Characterization of Multilayers for X-ray Optics

Astronomy and Astrophysics – Astronomy

Scientific paper

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Scientific paper

We are engaged in a program to develop multilayer coatings for hard X-ray telescopes. Using a DC magnetron sputtering process, multilayer coatings have been fabricated and we have investigated film quality as a result of changes in Argon backpressure. Various single layer and multilayer coatings have been deposited and characterization of these films has been carried out using Atomic Force Microscopy (AFM), Transmission Electron Microscopy (TEM), Auger Electron Spectroscopy (AES), Rutherford Backscattering Spectroscopy (RBS), and X-Ray Reflectivity (XRR). The trends observed in film quality as a function of Argon backpressure are discussed.

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