Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control

Details Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control

Feb 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4493...29d&link_type=abstract

Proc. SPIE Vol. 4493, p. 29-34, High-Resolution Wavefront Control: Methods, Devices, and Applications III, John D. Gonglewski; M

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Micromachined electrostatic membrane mirrors have been in use for several years in active and adaptive optics applications. We introduce a deformable mirror with small static aberrations and resistant to damage during electrostatic snap-down in an architecture designed so that a multi-layer dielectric coatings that can be applied before the mirror is released. We also make laboratory performance measurements and produce a closed loop control algorithm.

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