Statistics – Applications
Scientific paper
Jul 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1900..219l&link_type=abstract
Proc. SPIE Vol. 1900, p. 219-227, Charge-Coupled Devices and Solid State Optical Sensors III, Morley M. Blouke; Ed.
Statistics
Applications
1
Scientific paper
The optimization of back illuminated CCDs for low-light-level applications requires many process steps. One such step is the deposition of thin films on the freshly thinned backside surface. These films may consist of many layers depending on both the desired properties of the detector and on the backside charging mechanism. We describe our backside coating process which has been optimized for astronomical applications. After thinning, we first grow a thin silicon oxide film in a steam environment. Following oxidation we deposit an antireflection coating optimized for a particular wavelength. We may also deposit a thin film of platinum between these layers that acts to charge the backside. Using these thin film coatings we have been able to produce CCDs which reach silicon's theoretical maximum quantum efficiency over the 300 - 1000 nm wavelength region.
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