Astronomy and Astrophysics – Astronomy
Scientific paper
Oct 1996
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2808..481b&link_type=abstract
Proc. SPIE Vol. 2808, p. 481-491, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VII, Oswald H. Siegmund; Mark A. Gummi
Astronomy and Astrophysics
Astronomy
Scientific paper
Back-illuminated CCDs with high quantum efficiency in the soft x-ray range have been developed by EEV in collaboration with the Space Research Organization of the Netherlands (SRON) and the European Space Agency (ESA). These CCDs will be used as detector for the reflection grating spectrometer on board of the ESA x-ray multi-mirror mission XMM. To cover the full image of the reflection grating spectrometer an array of 9 CCDs along the Rowland circle with minimum dead space between the adjacent CCDs is needed. To obtain a high quantum efficiency over the full energy range (0.35 to 2.3 keV) the CCDs are illuminated from the backside. This requires a thin (approximately 50 nm) and homogeneous passivated layer at the backside, which is obtained by gas immersion laser doping. In addition a thin Al layer is deposited on the backside to reduce the sensitivity of the CCDs for visible/UV light. The technical aspects of the production of these CCDs as well as their calibration are discussed.
Aarts Henry J.
Bootsma T. M.
Brinkman Albert C.
de Jong L.
de Korte Piet A.
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