Arrays of TES Detectors for High Resolution X-Ray Spectroscopy

Details Arrays of TES Detectors for High Resolution X-Ray Spectroscopy Arrays of TES Detectors for High Resolution X-Ray Spectroscopy

May 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003head....7.2233d&link_type=abstract

American Astronomical Society, HEAD meeting #7, #22.33; Bulletin of the American Astronomical Society, Vol. 35, p.865

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NIST has been developing arrays of Transition Edge Sensor (TES) detectors for use in high resolution x-ray spectroscopy applications. These arrays are designed for use both in imaging spectroscopy at the focal plane of an x-ray telescope (e.g., Constellation X), and to rapidly collect spectra for materials analysis applications. In order to build a complete detector system, several areas of technology development have been pursued. Surface micromachining and deep reactive ion etching have been incorporated into detector array fabrication processes, and new materials are being investigated to produce the superconducting films used in TES detectors. SQUID multiplexing has been developed and tested with eight x-ray TES detectors.

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