Application of SLMs for optical metrology

Details Application of SLMs for optical metrology Application of SLMs for optical metrology

Nov 2001

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2001spie.4457...72t&link_type=abstract

Proc. SPIE Vol. 4457, p. 72-81, Spatial Light Modulators: Technology and Applications, Uzi Efron; Ed.

Statistics

Applications

3

Scientific paper

For wavefront sensing, wavefront shaping, and optical filtering, spatial light modulators can be very useful. With the availability of high resolution liquid crystals (LC) spatial phase modulators and micromechanical systems (MEMS) containing large arrays of micromirrors, new applications in optical metrology become possible. For wavefront analysis and correction, dynamic CGHs are used. A correction hologram for the aberrated system is computed from which the lens shape can be derived. For Hartmann sensors, usually static microlenses are used. It was found advantageous to generate dynamic microlenses in order to correct for local wavefront aberrations. Optically addressed spatial light modulators can be applied very effectively for the characterisation and defect analysis of primarily periodic structures such as microchips or microlens arrays. For triangulation based methods, better results can be obtained by adapting the projected fringes to the object in terms of shape and brightness. Examples and experimental results are discussed.

Affiliated with

Also associated with

No associations

Rating

Application of SLMs for optical metrology does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Application of SLMs for optical metrology, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Application of SLMs for optical metrology will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1187759