Antenna-coupled arrays of NbSi micro-bolometers

Astronomy and Astrophysics – Astronomy

Scientific paper

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Bolometers, Antenna, Arrays, Mm-Wave Astronomy

Scientific paper

Microbolometers are at present the most sensitive detectors for mm and sub-mm Astronomy. They are in use in most of the present instruments in that bandwidth. We have developed filled arrays of NbSi-based planar antenna coupled microbolometers. The fabrication details are given, together with characterization of the NbSi thermometers and optical results. The optical performances are potentially good for ground-based mm-wave astronomy applications, while the overall detectors performances are limited by low-frequency excess noise in the thermometric NbSi high-impedance sensors (Anderson insulator).

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