Antenna-coupled arrays of NbSi micro-bolometers

Details Antenna-coupled arrays of NbSi micro-bolometers Antenna-coupled arrays of NbSi micro-bolometers

Nov 2011

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011exa....32..179b&link_type=abstract

Experimental Astronomy, Volume 32, Issue 2, pp.179-191

Astronomy and Astrophysics

Astronomy

Bolometers, Antenna, Arrays, Mm-Wave Astronomy

Scientific paper

Microbolometers are at present the most sensitive detectors for mm and sub-mm Astronomy. They are in use in most of the present instruments in that bandwidth. We have developed filled arrays of NbSi-based planar antenna coupled microbolometers. The fabrication details are given, together with characterization of the NbSi thermometers and optical results. The optical performances are potentially good for ground-based mm-wave astronomy applications, while the overall detectors performances are limited by low-frequency excess noise in the thermometric NbSi high-impedance sensors (Anderson insulator).

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