Analysis of Ternary InGaN Layers Grown By Atmospheric Pressure Vertical MOVPE

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Iii-V Semiconductors, Galvanomagnetic And Other Magnetotransport Effects, Iii-V Semiconductors, X-Ray Diffraction, Chemical Vapor Deposition, Nucleation And Growth: Microscopic Aspects

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We present a study on the n-type ternary InGaN layers grown by atmospheric pressure vertical metal organic chemical vapor deposition on GaN template/(0001) sapphire substrate. An investigation in the different growth conditions on n-type of the InxGa1-xN, alloys was made for three series samples. Structural, electrical and optical properties were characterized by High X-Ray Diffraction, Hall effect and Photoluminescence respectively.

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