Analysis of mirror surface after laser or ion removal of contaminants

Details Analysis of mirror surface after laser or ion removal of contaminants Analysis of mirror surface after laser or ion removal of contaminants

Nov 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1329..141b&link_type=abstract

IN: Optical system contamination: Effects, measurement, control II; Proceedings of the Meeting, San Diego, CA, July 10-12, 1990

Mathematics

Logic

Carbon Dioxide Lasers, Contaminants, Gas Ionization, Mirrors, Surface Properties, Bidirectional Reflectance, Optical Microscopes, Profilometers

Scientific paper

Mirrors have been examined using various surface analytical techniques following experiments to remove contaminants using either a CO2 laser or an argon ion gun. Optical microscopy, scanning electron microscopy, and noncontact surface profilometry were used to obtain morphological information about the mirror surface. X-ray photoelectron spectroscopy, energy dispersive X-ray analysis, and gas chromatograph/mass spectrometry were used to investigate the composition of the mirror surface.

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