Analyses of laser-assisted removal of adhering particles from silicon surfaces

Details Analyses of laser-assisted removal of adhering particles from silicon surfaces Analyses of laser-assisted removal of adhering particles from silicon surfaces

Oct 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..518g&link_type=abstract

NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum

Statistics

Applications

Surface Cleaning, Laser Materials Processing, Silicon, Surface Cleaning, Etching, Patterning, Industrial Applications

Scientific paper

Mechanisms involved in laser-assisted particle removal are investigated by using combined theoretical and experimental approaches. For the first time, experiments have been performed to evaluate the influence of the pulse shape on the laser process efficiency. The contribution of the inertia force in cleaning has been demonstrated but not as the dominant mechanism. Surface temperature, dynamics of materials and adhesion characteristics are calculated for the experimental conditions in order to examine their role in dry laser cleaning.

Affiliated with

Also associated with

No associations

Rating

Analyses of laser-assisted removal of adhering particles from silicon surfaces does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Analyses of laser-assisted removal of adhering particles from silicon surfaces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Analyses of laser-assisted removal of adhering particles from silicon surfaces will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1619592