An analysis of ultrashort pulse laser micromachining parameters for the optimization of shallow hole drilling

Details An analysis of ultrashort pulse laser micromachining parameters for the optimization of shallow hole drilling An analysis of ultrashort pulse laser micromachining parameters for the optimization of shallow hole drilling

May 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006spie.6261e..60c&link_type=abstract

High-Power Laser Ablation VI. Edited by Phipps, Claude R.. Proceedings of the SPIE, Volume 6261, pp. 62612D (2006).

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Scientific paper

Using a factorial design of experiments approach with ANOVA, laser drilling experiments were performed on the semiconductor mercury-cadmium-telluride (HgCdTe). A commercial CPA femtosecond laser system operating at 775nm was used for the experiments. The test variables include laser parameters such as pulse length, fluence, beam shaping using apertures, assist gas, vacuum, and others. The response variable examined for optimization include hole size, hole depth, and melt effects. The analysis yielded an empirical formula for predicting laser drilling effects.

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