A test facility to calibrate EUV detectors.

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Scientific paper

A new test facility has been realized in the authors' laboratories to calibrate detectors in the ultraviolet region between 300 Å and 2500 Å. It consists of a vacuum normal incidence Johnson-Onaka monochromator with a set of interchangeable gratings and several UV lamps to optimally cover the whole spectral range. A pair of NIST calibrated photodiodes allows an absolute measurement of the photon flux outcoming from the monochromator, and thus it is possible to evaluate the quantum efficiency of the detectors under test. Moreover, other characteristic parameter of UV detectors can be evaluated, like for example the spatial resolution and the uniformity response. The results of the quantum efficiency measurements of an EEV ion implanted CCD are shown. Finally, the possible improvements necessary to optimize this test facility are discussed.

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