A stationary free boundary problem modeling electrostatic MEMS

Details A stationary free boundary problem modeling electrostatic MEMS A stationary free boundary problem modeling electrostatic MEMS

2011-11-04

arxiv.org/abs/1111.1156v1

Mathematics

Analysis of PDEs

Scientific paper

A free boundary problem describing small deformations in a membrane based model of electrostatically actuated MEMS is investigated. The existence of stationary solutions is established for small voltage values. A justification of the widely studied narrow-gap model is given by showing that steady state solutions of the free boundary problem converge toward stationary solutions of the narrow-gap model when the aspect ratio of the device tends to zero.

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