A silicon based MEMS technology for electrostatically actuated SPDT RF switches

Details A silicon based MEMS technology for electrostatically actuated SPDT RF switches A silicon based MEMS technology for electrostatically actuated SPDT RF switches

Dec 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002esasp.507...41a&link_type=abstract

Proceedings of the European Space Components Conference, ESCCON 2002, 24-27 September 2002, Toulouse, France. Compiled by R.A. H

Computer Science

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Scientific paper

There is an increasing interest of space industries towards the MEMS devices, which already found several applications in other sectors. The potential benefits from the use of those devices are good electrical performances, power savings, small size. This article describes a silicon technology used for the development of MEMS RF switches. The choice of a well established technology helps maintaining competitive manufacturing costs. The electrical and mechanical designs make use of FDTD / TLM and ANSYS simulation tools respectively. The test results of the first wafer run are also presented.

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