A Precisely Aligned CCD Mosaic

Astronomy and Astrophysics – Astronomy

Scientific paper

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Instrumentation: Detectors

Scientific paper

Using semiconductor lithography and etching, we have developed a technique for the precise alignment of individual CCD detectors on a mosaic substrate. Details of the technique and the fabrications of a prototype mosaic are described. The composite device is flat to within +/- 5 microns, with rows/columns oriented to within 20 ppm. (SECTION: Astronomical Instrumentation)

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