A piecewise-linear reduced-order model of squeeze-film damping for deformable structures including large displacement effects

Details A piecewise-linear reduced-order model of squeeze-film damping for deformable structures including large displacement effects A piecewise-linear reduced-order model of squeeze-film damping for deformable structures including large displacement effects

2008-05-07

arxiv.org/abs/0805.0894v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

10.1088/0960-1317/18/3/035042

This paper presents a reduced-order model for the Reynolds equation for deformable structure and large displacements. It is based on the model established in [11] which is piece-wise linearized using two different methods. The advantages and drawbacks of each method are pointed out. The pull-in time of a microswitch is determined and compared to experimental and other simulation data.

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