A New Machine for Planarity Measurement of CCDs and Mosaics of CCDs

Astronomy and Astrophysics – Astronomy

Scientific paper

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Ccd Flatness, Ccd Alignment, Flatness Measurement, Triangulation Sensor, Laser Triangulation

Scientific paper

High quality CCD detectors are now being produced with 2048 × 4096 square pixels, each 15 mm on a side. Even larger detector areas are built with several CCDs mounted into a mosaic. To be useful in an instrument the light must be in focus on all CCDs, requiring that all CCDs in a mosaic must typically be aligned within 30 micron of a flat plane. To achieve this accuracy in many cases the measurement and correction of the CCD alignment is necessary. One way allowing a surface measurement, even when the CCD is protected by a window, is to use triangulation sensor. The principle of a triangulation sensor, its application and its implementation in a measuring machine are presented here.

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