A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

Details A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

2008-05-07

arxiv.org/abs/0805.0934v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)

Scientific paper

This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$\mu$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.

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