A Large Aperture Fabry-Perot Tunable Filter Based On Micro Opto Electromechanical Systems Technology

Details A Large Aperture Fabry-Perot Tunable Filter Based On Micro Opto Electromechanical Systems Technology A Large Aperture Fabry-Perot Tunable Filter Based On Micro Opto Electromechanical Systems Technology

Dec 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002aas...201.8208p&link_type=abstract

American Astronomical Society, 201st AAS Meeting, #82.08; Bulletin of the American Astronomical Society, Vol. 34, p.1240

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A research and development effort sponsored by the NASA Goddard Spaceflight Center (GSFC) is focused on applying Micro Opto Electromechanical Systems (MOEMS) technology to create a miniature Fabry-Perot tunable filter for space and ground-based near infrared imaging spectrometer applications. Unlike previous devices developed for small-aperture telecommunications systems, the GSFC research is directed toward a novel 12 - 40 mm aperture for astrophysical studies, including emission line imaging of galaxies and nebulae, and multi-spectral redshift surveys in the 1.1 - 2.3 um wavelength region. The MOEMS design features integrated electrostatic scanning of the 11-um optical gap, and capacitance micrometry for closed loop control of parallelism within a 10-nm tolerance. The low thermal mass and inertia inherent in MOEMS devices allows for rapid cooling to the proposed 30 K operating temperature, and high frequency response. Achieving the proposed 6-nm aperture flatness (with an effective finesse of 50) represents the primary technical challenge in the current 12-mm prototype.

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