Computer Science – Other Computer Science
Scientific paper
2007-11-21
Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)
Computer Science
Other Computer Science
Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
Scientific paper
This paper presents a micromachined bandpass filter with miniature size that has relatively outstanding performance. A silicon-based eight-order microstrip bandpass filter is fabricated and measured. A novel design method of the interdigital filter that can create two transmission zeros is described. The location of the transmission zeros can be shifted arbitrarily in the stopband. By adjusting the zero location properly, the filter provides much better skirt rejection and lower insertion loss than a conventional microstrip interdigital filter. To reduce the chip size, through-silicon-substrate-via-hole is used. Good experimental results are obtained.
Chen Chen
Jian Zhu
Xing Jia Shi
Yong Zhang
Yuanwei Yu
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