8x8 silicon photodiode matrix module

Statistics – Applications

Scientific paper

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Scientific paper

8 X 8 silicon photo diode matrix module has been successfully fabricated
by hybrid integrating technique. In this paper, the principle, the
design, the structure, fabrication process and its main parameters of
PIN-PD matrix module which has special arrangement of electrode and
structure of piling up optical-electro isolation are mainly described.

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