Mercury-contact switching with gap-closing microcantilever

Details Mercury-contact switching with gap-closing microcantilever Mercury-contact switching with gap-closing microcantilever

Sep 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996spie.2882..216s&link_type=abstract

Proc. SPIE Vol. 2882, p. 216-221, Micromachined Devices and Components II, Kevin Chau; Ray M. Roop; Eds.

Computer Science

Scientific paper

We present an electrostatically actuated micro-mechanical relay with a stationary mercury micro-drop at the point of contact. The moving element is 2 micrometers thick polysilicon cantilever with widths from 2 to 3 micrometers and lengths from 300 to 500 micrometers made through MCNC multi-user MEMS processes. A technique to selectively form microscale mercury on prescribed sites was used to accomplish mercury- to-electrode contacts for the relays. Measurements of the poly-mercury-poly contact resistance resulted in values that range from 800 to 1000 (Omega) , with most values near 1000 (Omega) . The total resistance of the devices varied from 1.9 k(Omega) to 3.2 k(Omega) depending on the device configuration. The device can switch loads over 10 mA.

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