Sputtering: survey of observations and derived principles: One contribution of 11 to a Theme 'Sputtering: past, present and future. W. R. Grove 150th Anniversary Issue'.

Statistics – Applications

Scientific paper

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Sputtering, Atomic Collisions, Surfaces, Sims, Depth Profiling

Scientific paper

We review the most salient observations and physical principles of knock-on and electronic sputtering and the role of sputtering in several astrophysical settings and applications in research and technology. In addition, we emphasize some unsolved problems, propose experiments and provide guides to representative literature reviews and significant recent publications.

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