Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device

Details Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device

2008-02-21

arxiv.org/abs/0802.3073v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)

Scientific paper

Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.

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