Development of binary band-limited coronagraph masks for extremely high contrast imaging of extrasolar planets with Terrestrial Planet Finder

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Scientific paper

We report progress on development of a new generation of binary band-limited coronagraphic image masks at Penn State for extremely high contrast imaging of extrasolar planets with future visible Terrestrial Planet Finder (TPF). The masks are being precisely fabricated with a state-of-the-art E-beam lithographer using ~20 nm precision and are capable of achieving contrasts of 10-9 with high throughput (> 40%) and close inner working distance (3 λ/D). A prototype with 250 nm precision has allowed us to reach ~10-6 contrast at 8 λ/D and 10-5 at 3 λ/D with ~27% throughput (Debes et al. 2004).

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