Radial variations of the plasma properties in a low-pressure Hg-Ar discharge

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Scientific paper

Mercury-rare gas discharge at low mercury pressure and moderate argon pressure has been modeled. The model is based on a 1D Boltzmann code selfconsistently coupled to equations for excited species and ions in a cylindrical geometry. The results describe the radial structure of the discharge, including the emission of 254 nm and 185 nm UV radiation. Summarizing the results of wide-range variations of external parameters such as Hg pressure and discharge current, we conclude that (i) the electron energy distribution function (EEDF) is strongly nonlocal (former models based on the local EEDF do not account for radial variations); (ii) the excitation and ionization rates peak near the center and the excited states densities deviate from Bessel profile, particularly those for the resonance and highly excited states and (iii) there is a substantial power transfer from one part of the discharge to another due to electron thermal flux. Comparison with existing experimental data demonstrate agreement with global properties such as power absorption per unit length and UV radiation, but the species population are calculated to be more centrally peaked than the limited data indicate.

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