A new meander channel 2D CCD imager on GaAs

Computer Science – Performance

Scientific paper

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Charge Coupled Devices, Gallium Arsenides, Image Converters, Meanders, Performance Prediction, Photoconductive Cells, Pixels, Schottky Diodes

Scientific paper

The design, fabrication, and operation of a two-phase meander-channel CCD imager on GaAs are described. The fabrication process is based on the use of anodic oxidation for producing thin dielectric isolations between close-packed Schottky-barrier metal electrodes and the employment of recessed gates for producing self-aligned potential barriers between the adjacent charge wells of the meander channel. Additionally, the semiinsulating property of GaAs is utilized in order to produce the high-speed photoconductive sensors. It is shown that such imagers can have unit cell sizes and pixel densities comparable to their silicon counterparts but offer the speed of performance higher by about one order of magnitude.

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