The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon

Details The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon

Jun 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005jmimi..15.1174r&link_type=abstract

Journal of Micromechanics and Microengineering, Volume 15, Issue 6, pp. 1174-1183 (2005).

Other

13

Scientific paper

Etching characteristics and properties of {1 1 0} silicon crystal planes used as 45° optical mirrors for deflecting optical beams from/to optical fibers were investigated. Fiber aligning grooves and passive mirror-like planes were realized by wet micromachining of (1 0 0) silicon in KOH IPA and TMAH IPA systems. Implementation of Triton-x-100 surfactant as an additive to 25% TMAH in anisotropic etching of {1 1 0} silicon passive mirror planes is reported and discussed. It was found that Triton-x-100 contents in the range of 10 200 ppm to the 25% TMAH water etchant significantly increase the anisotropy mostly by decreasing the {1 1 0} etch rate and retaining the {1 0 0} etch rate. It is also shown that {1 1 0} surface roughness is substantially improved compared to two other etching systems. Furthermore, efficient convex corner underetching reduction is demonstrated. The results of optical characterization of passive mirrors with 632 nm incident light show reduced scattering of reflected optical beam due to improved microroughness for mirrors made by TMAH Triton. For the reflection of the optical beam with 1.33 µm and 1.54 µm wavelengths, sputtered layer of gold is used as reflective coating on silicon mirrors thus increasing the reflected optical beam intensity by an additional 8%.

Affiliated with

Also associated with

No associations

Rating

The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1399721