Similarities and Differences of Environments in Plasma Etchers and in Low Earth Orbit

Computer Science

Scientific paper

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Scientific paper

degradation of materials from exposure to atomic oxygen in Low Earth Orbit (LEO). However the environment produced in an etcher differs greatly from environment in LEO. In this paper, the differences have been found by means of analyzing the mass loss of the HOPG graphite in different applied voltages in a plasma etcher. It is proved that the oxygen ions having more kinetic energy and oxygen atoms at excited state play important roles. The validity and the limitation of using the plasma etcher data to evaluate spacecraft materials have been presented. It appears that when plasma reacts with materials, the stronger the bond of materials is, the more important effects of oxygen ions are. The data for some materials in the plasma etcher have been compared with those in LEO. The reasons bringing about differences on some materials are analyzed. The data deviate from those in LEO for the materials with strong bond. It may be seen that plasma etchers are good to evaluate the atomic oxygen durability of protective coating. 53rd IAC, I.5 Environmental Effects and Structures Protection in I. Materials and Structures Symposium

No associations

LandOfFree

Say what you really think

Search LandOfFree.com for scientists and scientific papers. Rate them and share your experience with other people.

Rating

Similarities and Differences of Environments in Plasma Etchers and in Low Earth Orbit does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Similarities and Differences of Environments in Plasma Etchers and in Low Earth Orbit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Similarities and Differences of Environments in Plasma Etchers and in Low Earth Orbit will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFWR-SCP-O-1331820

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.