Infrared analysis of multilayer stacks deposited on rough and curved polymer substrates

Details Infrared analysis of multilayer stacks deposited on rough and curved polymer substrates Infrared analysis of multilayer stacks deposited on rough and curved polymer substrates

Jun 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aipc..430..647v&link_type=abstract

The eleventh international conference on fourier transform spectroscopy. AIP Conference Proceedings, Volume 430, pp. 647-652 (1

Computer Science

Polymers, Organic Compounds, Polymers, Organic Compounds

Scientific paper

We describe a method to analyze multilayer thin film systems deposited
on microscopically rough and macroscopically curved polymer substrates
by means of optical spectroscopy. As an example SiOx multilayers are
analyzed with respect to layer thicknesses and oxygen content.

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