FTIR monitoring of industrial scale CVD processes

Details FTIR monitoring of industrial scale CVD processes FTIR monitoring of industrial scale CVD processes

Jun 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aipc..430..470h&link_type=abstract

The eleventh international conference on fourier transform spectroscopy. AIP Conference Proceedings, Volume 430, pp. 470-473 (1

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Chemical Vapor Deposition

Scientific paper

The goal is to improve chemical vapour deposition (CVD) and infiltration (CVI) process control by a multipurpose, knowledge based feedback system. For monitoring the CVD/CVI process in-situ FTIR spectroscopic data has been identified as input information. In the presentation, three commonly used, and distinctly different, types of industrial CVD/CVI processes are taken as test cases: (i) a thermal high capacity CVI batch process for manufacturing carbon fibre reinforced SiC composites for high temperature applications, (ii) a continuously driven CVD thermal process for coating float glass for energy protection, and (iii) a laser stimulated CVD process for continuously coating bundles of thin ceramic fibers. The feasibility of the concept with FTIR in-situ monitoring as a core technology has been demonstrated. FTIR monitoring sensibly reflects process conditions.

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