Astronomy and Astrophysics – Astronomy
Scientific paper
Dec 2001
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2001aas...199.0809m&link_type=abstract
American Astronomical Society, 199th AAS Meeting, #08.09; Bulletin of the American Astronomical Society, Vol. 33, p.1318
Astronomy and Astrophysics
Astronomy
Scientific paper
The near infrared spectrometer for the Next Generation Space Telescope will provide measurements of the earliest structures in the Universe. To meet its science goals, a large field of view, high efficiency, and a high degree of multiplex capability are required. During the mission formulation phase, we studied a multi-object spectrometer using a reflective slit mask realized by an array of individually articulated microscopic mirrors to achieve these goals. With NASA/NGST support, we are now developing a Micro Mirror Array specific to the spectrometer requirements as defined by NASA and the ESA design teams. Our approach provides a simple aluminum structure using electrostatic actuation for the mirror elements. This is constructed using MEMS techniques on top of a CMOS address circuit that provides a simple interface to the spectrometer and ease of operation. We have successfully demonstrated cryogenic operation of a variety of MEMS mirror structures, suitable CMOS circuits, and an integrated 32x32 MEMS/CMOS component. We will present a report on our progress and optical/mechanical characterization of the MMA components. This work is supported by NASA.
Dutta Sreedhar B.
MacKenty John W.
NGST MMA Team
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