Reflective high-NA projection lenses

Details Reflective high-NA projection lenses Reflective high-NA projection lenses

Sep 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5962..332m&link_type=abstract

Building European OLED Infrastructure. Edited by Pearsall, Thomas P.; Halls, Jonathan. Proceedings of the SPIE, Volume 5962, p

Astronomy and Astrophysics

Astronomy

Scientific paper

Dioptric systems are usually the first choice for the design of an optical system, e.g. a projection lens or a microscope. But in some cases refractive designs suffer from serious drawbacks like chromatic aberration or material problems (cost, quality, absorption, birefringence, etc.). In such cases reflective systems are an attractive alternative. Reflective systems can be subdivided into two classes: on one hand there are systems with central pupil obscuration, e.g. reflective microscopes or telescopes in astronomy, which have a high aperture but only a small field size, on the other hand there are unobscured systems, e.g. reflective relay systems or EUV projection lenses, which have a large field but only small aperture. By the combination of an unobscured and an obscured mirror system one obtains systems with large field and high numerical aperture. We present new designs, which prove this design principle.

Affiliated with

Also associated with

No associations

Rating

Reflective high-NA projection lenses does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Reflective high-NA projection lenses, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reflective high-NA projection lenses will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1223584