Compact debris shutter design of a laser-produced plasma source for high-NA application

Details Compact debris shutter design of a laser-produced plasma source for high-NA application Compact debris shutter design of a laser-produced plasma source for high-NA application

Nov 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4146..128y&link_type=abstract

Proc. SPIE Vol. 4146, p. 128-131, Soft X-Ray and EUV Imaging Systems, Winfried M. Kaiser; Richard H. Stulen; Eds.

Computer Science

1

Scientific paper

A compact debris shutter for use with a laser produced plasma source is designed for installation to our EUV interferometer. The shutter is for operation under vacuum based on a gyroscope design for space satellites. It is of a hollow cylinder shape of 20 cm diameter enabling to stop debris of the plasma source traveling at a speed below 260 m/s at a spinning speed of 6000 rpm.

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