Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam

Details Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam

Aug 2008

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008spie.7021e..52k&link_type=abstract

High Energy, Optical, and Infrared Detectors for Astronomy III. Edited by Dorn, David A.; Holland, Andrew D. Proceedings of

Astronomy and Astrophysics

Astronomy

5

Scientific paper

In order to improve the quantum efficiency (QE) at longer wavelength, we have developed fully-depleted backilluminated CCDs in collaboration with Hamamatsu Photonics K.K (HPK). Recently, HPK delivered 10 CCDs for Subaru Prime Focus Camera (Suprime-Cam). These CCDs are made on N-type, high resistivity silicon wafers. Each CCD has a 200 μm thick depletion layer. The CCD format is four-side buttable, 2k × 4k, 15 μm square pixels with 4 low noise output amplifiers. The characteristics of the CCDs have been tested in the laboratory before they are installed into Suprime-Cam dewar. These CCDs have excellent performance; readout noise < 5 e-, dark current < 2 e-/hour/pixel, parallel and serial charge transfer efficiency (CTE) > 0.999995, and full-well ~ 180,000 e-. The QE of λ = 1 μm was 40 % at -100°C. All CCDs have good cosmetics. Surface flatness is ~ 25 μm peak to value (P-V). The specification was acceptable. We are also developing CCDs for Hype Suprime-Cam (HSC), the next generation instrument for Subaru Telescope. HPK optimized back side process and has developed blue enhanced CCDs for HSC.

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